Inventor

KIRCH MARC

DE3 patents

⚠️ This page may combine multiple inventors who share the name “KIRCH MARC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FIOLKA DAMIAN

1 patent

US8587767B2Nov 19, 2013

Illumination optics for EUV microlithography and related system and apparatus

FIOLKA DAMIAN12 citations82

KIRCH MARC

1 patent

US9063336B2Jun 23, 2015

Optical element having a plurality of reflective facet elements

KIRCH MARC3 citations55

ENDRES MARTIN

1 patent

US8395754B2Mar 12, 2013

Illumination optical unit for EUV microlithography

ENDRES MARTIN4 citations55