Inventor
TAYLOR TRAVIS R
US11 patents
⚠️ This page may combine multiple inventors who share the name “TAYLOR TRAVIS R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS7004825B1Feb 28, 2006
Apparatus and associated method for conditioning in chemical mechanical planarization
LAM RES CORP20 citations92
US7153182B1Dec 26, 2006
System and method for in situ characterization and maintenance of polishing pad smoothness in chemical mechanical polishing
LAM RES CORP13 citations78
US6712679B2Mar 30, 2004
Platen assembly having a topographically altered platen surface
LAM RES CORP18 citations77
US6666755B1Dec 23, 2003
Belt wiper for a chemical mechanical planarization system
LAM RES CORP9 citations68
US9335248B1May 10, 2016
Systems and methods for quantifying particle performance in a substrate processing system
LAM RES CORP2 citations61
US7025660B2Apr 11, 2006
Assembly and method for generating a hydrodynamic air bearing
LAM RES CORP5 citations61
US12094739B2Sep 17, 2024
Autoclean for load locks in substrate processing systems
LAM RES CORP0 citations41
US10903065B2Jan 26, 2021
Halogen removal module and associated systems and methods
LAM RES CORP0 citations34