Inventor

KADKHODAYAN BOBBY

US3 patents

⚠️ This page may combine multiple inventors who share the name “KADKHODAYAN BOBBY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAYLOR TRAVIS R

1 patent

US8622021B2Jan 7, 2014

High lifetime consumable silicon nitride-silicon dioxide plasma processing components

TAYLOR TRAVIS R172 citations94

KADKHODAYAN BOBBY

1 patent

US8522716B2Sep 3, 2013

Protective coating for a plasma processing chamber part and a method of use

KADKHODAYAN BOBBY21 citations88

LAM RES CORP

1 patent

US6887340B2May 3, 2005

Etch rate uniformity

LAM RES CORP16 citations82