Inventor

TROJAN DANIEL R

US8 patents

⚠️ This page may combine multiple inventors who share the name “TROJAN DANIEL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TROJAN DANIEL R

2 patents

US7540799B1Jun 2, 2009

System for adjusting an end effector relative to a workpiece

TROJAN DANIEL R12 citations79

US8944887B2Feb 3, 2015

Apparatus and method for surface grinding and edge trimming workpieces

TROJAN DANIEL R0 citations32

AXUS TECH LLC

2 patents

US11376705B2Jul 5, 2022

Chemical mechanical planarization carrier system

AXUS TECH LLC0 citations54

US10315286B2Jun 11, 2019

Chemical mechanical planarization carrier system

AXUS TECH LLC0 citations44

OBSIDIAN INC

1 patent

US5899798AMay 4, 1999

Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing

OBSIDIAN INC72 citations94

APPLIED MATERIALS INC

1 patent

US6116990ASep 12, 2000

Adjustable low profile gimbal system for chemical mechanical polishing

APPLIED MATERIALS INC36 citations91

SPEEDFAM IPEC CORP

1 patent

US6125861AOct 3, 2000

Post-CMP wet-HF cleaning station

SPEEDFAM IPEC CORP9 citations70

AXUS TECHNOLOGY LLC

1 patent

US9390903B2Jul 12, 2016

Method and apparatus for wafer backgrinding and edge trimming on one machine

AXUS TECHNOLOGY LLC0 citations27