Inventor
THORNELL JOHN
US4 patents
Patents
4 patentsUS10024804B2Jul 17, 2018
System and method of characterizing micro-fabrication processes
RUDOLPH TECH INC0 citations45
US9658169B2May 23, 2017
System and method of characterizing micro-fabrication processes
RUDOLPH TECH INC0 citations45
US10553504B2Feb 4, 2020
Inspection of substrates
RUDOLPH TECH INC0 citations44
US10466179B2Nov 5, 2019
Semiconductor device inspection of metallic discontinuities
RUDOLPH TECH INC0 citations44