Inventor

DURDEN KENNETH

US4 patents

⚠️ This page may combine multiple inventors who share the name “DURDEN KENNETH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RUDOLPH TECHNOLOGIES INC

2 patents

US7593565B2Sep 22, 2009

All surface data for use in substrate inspection

RUDOLPH TECHNOLOGIES INC11 citations79

US7835566B2Nov 16, 2010

All surface data for use in substrate inspection

RUDOLPH TECHNOLOGIES INC5 citations57

RUDOLPH TECH INC

2 patents

US10024804B2Jul 17, 2018

System and method of characterizing micro-fabrication processes

RUDOLPH TECH INC0 citations45

US9658169B2May 23, 2017

System and method of characterizing micro-fabrication processes

RUDOLPH TECH INC0 citations45