Inventor
LIOU JUSTIN DIANHUAN
US11 patents
⚠️ This page may combine multiple inventors who share the name “LIOU JUSTIN DIANHUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
10 patentsUS9608399B2Mar 28, 2017
193 nm laser and an inspection system using a 193 nm laser
KLA TENCOR CORP21 citations94
US9529182B2Dec 27, 2016
193nm laser and inspection system
KLA TENCOR CORP33 citations94
US9151940B2Oct 6, 2015
Semiconductor inspection and metrology system using laser pulse multiplier
KLA TENCOR CORP32 citations93
US9525265B2Dec 20, 2016
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
KLA TENCOR CORP6 citations83
US9972959B2May 15, 2018
Semiconductor inspection and metrology system using laser pulse multiplier
KLA TENCOR CORP2 citations73
US9768577B2Sep 19, 2017
Semiconductor inspection and metrology system using laser pulse multiplier
KLA TENCOR CORP5 citations72
US10439355B2Oct 8, 2019
193nm laser and inspection system
KLA TENCOR CORP0 citations52
US10193293B2Jan 29, 2019
Semiconductor inspection and metrology system using laser pulse multiplier
KLA TENCOR CORP0 citations52
US9935421B2Apr 3, 2018
193nm laser and inspection system
KLA TENCOR CORP0 citations52
US10044164B2Aug 7, 2018
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
KLA TENCOR CORP0 citations51