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Inventor
BECKER JILL SVENJA
US
4 patents
⚠️ This page may combine multiple inventors who share the name “BECKER JILL SVENJA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULTRATECH INC
2 patents
US9567670B2
Feb 14, 2017
Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range
ULTRATECH INC
3 citations
67
US9783888B2
Oct 10, 2017
Atomic layer deposition head
ULTRATECH INC
1 citations
46
COUTU ROGER R
1 patent
US9777371B2
Oct 3, 2017
ALD systems and methods
COUTU ROGER R
4 citations
62
MONSMA DOUWE JOHANNES
1 patent
US9556519B2
Jan 31, 2017
Vapor deposition systems and methods
MONSMA DOUWE JOHANNES
0 citations
41