Inventor

DALBERTH MARK J

US3 patents

⚠️ This page may combine multiple inventors who share the name “DALBERTH MARK J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULTRATECH INC

2 patents

US9567670B2Feb 14, 2017

Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range

ULTRATECH INC3 citations67

US9783888B2Oct 10, 2017

Atomic layer deposition head

ULTRATECH INC1 citations46

OPTICAL COMM PRODUCTS INC

1 patent

US6679946B1Jan 20, 2004

Method and apparatus for controlling substrate temperature and layer thickness during film formation

OPTICAL COMM PRODUCTS INC32 citations89