Inventor

MINEKAWA YUKIE

JP2 patents

Patents

2 patents

US10734251B2Aug 4, 2020

Liquid processing apparatus, liquid processing method, and storage medium for liquid process

TOKYO ELECTRON LTD5 citations71

US10274843B2Apr 30, 2019

Exposure apparatus, exposure method and storage medium

TOKYO ELECTRON LTD1 citations57