Inventor
FAN YUH-TA
TW13 patents
Patents
13 patentsUS11264467B2Mar 1, 2022
Semiconductor device having multi-layer diffusion barrier and method of making the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10749004B2Aug 18, 2020
Semiconductor device having a multi-layer diffusion barrier
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10319857B2Jun 11, 2019
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US9812570B2Nov 7, 2017
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12033900B2Jul 9, 2024
Trench isolation with conductive structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11430700B2Aug 30, 2022
Trench isolation with conductive structures
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11742393B2Aug 29, 2023
Semiconductor device having a multi-layer diffusion barrier and method of making the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11411108B2Aug 9, 2022
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12020947B2Jun 25, 2024
Method of manufacturing semiconductor devices and semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11069534B2Jul 20, 2021
Method of manufacturing semiconductor devices and semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10153156B2Dec 11, 2018
Plasma enhanced atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US10818790B2Oct 27, 2020
Semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9595593B2Mar 14, 2017
Semiconductor structure with interfacial layer and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50