Inventor
SPYROPOULOS EVANGELOS
FR8 patents
⚠️ This page may combine multiple inventors who share the name “SPYROPOULOS EVANGELOS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS9090972B2Jul 28, 2015
Gas supply systems for substrate processing chambers and methods therefor
LAM RES CORP6 citations82
US9778083B2Oct 3, 2017
Metrology method for transient gas flow
LAM RES CORP2 citations71
US9721763B2Aug 1, 2017
Systems and methods for providing gases to a process chamber
LAM RES CORP2 citations71