Inventor
TAKEYASU NOBUYUKI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “TAKEYASU NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KAWASAKI STEEL CO
10 patentsUS5486492AJan 23, 1996
Method of forming multilayered wiring structure in semiconductor device
KAWASAKI STEEL CO115 citations98
US6063703AMay 16, 2000
Method for making metal interconnection
KAWASAKI STEEL CO49 citations96
US5973402AOct 26, 1999
Metal interconnection and method for making
KAWASAKI STEEL CO48 citations96
US5627345AMay 6, 1997
Multilevel interconnect structure
KAWASAKI STEEL CO45 citations96
US5627102AMay 6, 1997
Method for making metal interconnection with chlorine plasma etch
KAWASAKI STEEL CO89 citations96
US5952723ASep 14, 1999
Semiconductor device having a multilevel interconnection structure
KAWASAKI STEEL CO42 citations92
US5652180AJul 29, 1997
Method of manufacturing semiconductor device with contact structure
KAWASAKI STEEL CO35 citations92
US5637534AJun 10, 1997
Method of manufacturing semiconductor device having multilevel interconnection structure
KAWASAKI STEEL CO26 citations92
US6001736ADec 14, 1999
Method of manufacturing semiconductor device and an apparatus for manufacturing the same
KAWASAKI STEEL CO48 citations90
US5946799ASep 7, 1999
Multilevel interconnect method of manufacturing
KAWASAKI STEEL CO9 citations74