Inventor
KONDOH EIICHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KONDOH EIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KAWASAKI STEEL CO
8 patentsUS6063703AMay 16, 2000
Method for making metal interconnection
KAWASAKI STEEL CO49 citations96
US5973402AOct 26, 1999
Metal interconnection and method for making
KAWASAKI STEEL CO48 citations96
US5627102AMay 6, 1997
Method for making metal interconnection with chlorine plasma etch
KAWASAKI STEEL CO89 citations96
US5952723ASep 14, 1999
Semiconductor device having a multilevel interconnection structure
KAWASAKI STEEL CO42 citations92
US5637534AJun 10, 1997
Method of manufacturing semiconductor device having multilevel interconnection structure
KAWASAKI STEEL CO26 citations92
US5225245AJul 6, 1993
Chemical vapor deposition method for forming thin film
KAWASAKI STEEL CO23 citations90
US5209182AMay 11, 1993
Chemical vapor deposition apparatus for forming thin film
KAWASAKI STEEL CO49 citations90
US5552181ASep 3, 1996
Method for supplying liquid material and process for forming thin films using the liquid material supplying method
KAWASAKI STEEL CO29 citations89