Inventor
KATAGIRI TOMOHARU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KATAGIRI TOMOHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KAWASAKI STEEL CO
6 patentsUS6063703AMay 16, 2000
Method for making metal interconnection
KAWASAKI STEEL CO49 citations96
US5973402AOct 26, 1999
Metal interconnection and method for making
KAWASAKI STEEL CO48 citations96
US5627102AMay 6, 1997
Method for making metal interconnection with chlorine plasma etch
KAWASAKI STEEL CO89 citations96
US5290736AMar 1, 1994
Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric
KAWASAKI STEEL CO62 citations94
US5952723ASep 14, 1999
Semiconductor device having a multilevel interconnection structure
KAWASAKI STEEL CO42 citations92
US5637534AJun 10, 1997
Method of manufacturing semiconductor device having multilevel interconnection structure
KAWASAKI STEEL CO26 citations92