Inventor
OHTA TOMOHIRO
JP30 patents
⚠️ This page may combine multiple inventors who share the name “OHTA TOMOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KAWASAKI STEEL CO
25 patentsUS5486492AJan 23, 1996
Method of forming multilayered wiring structure in semiconductor device
KAWASAKI STEEL CO115 citations98
US6063703AMay 16, 2000
Method for making metal interconnection
KAWASAKI STEEL CO49 citations96
US5973402AOct 26, 1999
Metal interconnection and method for making
KAWASAKI STEEL CO48 citations96
US5840821ANov 24, 1998
Coating solution and method for preparing the coating solution, method for forming insulating films for semiconductor devices, and method for evaluating the coating solution
KAWASAKI STEEL CO45 citations96
US5627102AMay 6, 1997
Method for making metal interconnection with chlorine plasma etch
KAWASAKI STEEL CO89 citations96
US5627345AMay 6, 1997
Multilevel interconnect structure
KAWASAKI STEEL CO45 citations96
US5605867AFeb 25, 1997
Method of manufacturing insulating film of semiconductor device and apparatus for carrying out the same
KAWASAKI STEEL CO86 citations96
US5532191AJul 2, 1996
Method of chemical mechanical polishing planarization of an insulating film using an etching stop
KAWASAKI STEEL CO60 citations96
US5290736AMar 1, 1994
Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric
KAWASAKI STEEL CO62 citations94
US5305519AApr 26, 1994
Multilevel interconnect structure and method of manufacturing the same
KAWASAKI STEEL CO49 citations93
US5998522ADec 7, 1999
Coating solution and method for preparing the coating solution, method for forming insulating films for semiconductor devices, and method for evaluating the coating solution
KAWASAKI STEEL CO32 citations92
US5952723ASep 14, 1999
Semiconductor device having a multilevel interconnection structure
KAWASAKI STEEL CO42 citations92
US5679974AOct 21, 1997
Antifuse element and semiconductor device having antifuse elements
KAWASAKI STEEL CO20 citations92
US5652180AJul 29, 1997
Method of manufacturing semiconductor device with contact structure
KAWASAKI STEEL CO35 citations92
US5641985AJun 24, 1997
Antifuse element and semiconductor device having antifuse elements
KAWASAKI STEEL CO35 citations92
US5637534AJun 10, 1997
Method of manufacturing semiconductor device having multilevel interconnection structure
KAWASAKI STEEL CO26 citations92
US5565702AOct 15, 1996
Antifuse element, semiconductor device having antifuse elements, and method for manufacturing the same
KAWASAKI STEEL CO41 citations92
US5521423AMay 28, 1996
Dielectric structure for anti-fuse programming element
KAWASAKI STEEL CO45 citations92
US5300321AApr 5, 1994
Process for depositing titanium nitride film by CVD
KAWASAKI STEEL CO45 citations92
US6001736ADec 14, 1999
Method of manufacturing semiconductor device and an apparatus for manufacturing the same
KAWASAKI STEEL CO48 citations90
US5225245AJul 6, 1993
Chemical vapor deposition method for forming thin film
KAWASAKI STEEL CO23 citations90
US5209182AMay 11, 1993
Chemical vapor deposition apparatus for forming thin film
KAWASAKI STEEL CO49 citations90
US5552181ASep 3, 1996
Method for supplying liquid material and process for forming thin films using the liquid material supplying method
KAWASAKI STEEL CO29 citations89
US5946799ASep 7, 1999
Multilevel interconnect method of manufacturing
KAWASAKI STEEL CO9 citations74
US5308651AMay 3, 1994
Photochemical vapor deposition process
KAWASAKI STEEL CO19 citations72