Inventor
LI JUNLIANG
CN5 patents
⚠️ This page may combine multiple inventors who share the name “LI JUNLIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD
2 patentsUS12347661B2Jul 1, 2025
Pressure control system for a multi-head processing chamber of a plasma processing apparatus
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations46
US12009220B2Jun 11, 2024
Method for processing workpiece, plasma processing apparatus and semiconductor device
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations44