Inventor
MINAKAIS MATTHEW
US3 patents
Patents
3 patentsUS12360466B2Jul 15, 2025
Maintenance of modules for light sources used in semiconductor photolithography
Cymer LLC0 citations49
US12216411B2Feb 4, 2025
Predictive apparatus in a gas discharge light source
Cymer LLC0 citations49
US12007696B2Jun 11, 2024
Burst statistics data aggregation filter
Cymer LLC0 citations43