Inventor
UNE ATSUNOBU
JP3 patents
Patents
3 patentsUS5000573AMar 19, 1991
Method of alignment with the use of diffraction gratings and an apparatus therefor
NIPPON TELEGRAPH & TELEPHONE58 citations94
US5241183AAug 31, 1993
Vertical xy stage
NIPPON TELEGRAPH & TELEPHONE65 citations92
US4656347AApr 7, 1987
Diffraction grating position adjuster using a grating and a reflector
NIPPON TELEGRAPH & TELEPHONE45 citations89