Inventor

SHIMOMURA MITSUZO

JP3 patents

Patents

3 patents

US5129418AJul 14, 1992

Mass flow controller with supplemental condition sensors

STEC INC143 citations96

US5141021AAug 25, 1992

Mass flow meter and mass flow controller

STEC INC54 citations94

US4822469AApr 18, 1989

Electrical power supply for an electrolytic gas generator

STEC INC42 citations85