Inventor

NENADIC ANTON

US11 patents

Patents

11 patents

US5084071AJan 28, 1992

Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor

IBM253 citations98

US4954142ASep 4, 1990

Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor

IBM330 citations98

US5226636AJul 13, 1993

Holding fixture for substrates

IBM34 citations90

US5315749AMay 31, 1994

Method for holding substrates

IBM15 citations79

US6896784B2May 24, 2005

Method for controlling local current to achieve uniform plating thickness

IBM8 citations71

US6890413B2May 10, 2005

Method and apparatus for controlling local current to achieve uniform plating thickness

IBM6 citations71

US5795217AAug 18, 1998

Stressed burnisher

IBM8 citations71

US5871313AFeb 16, 1999

Precise self-aligning chamfer method and apparatus

IBM13 citations70

US5706568AJan 13, 1998

Automated chamfering apparatus and method

IBM12 citations68

US6050758AApr 18, 2000

Automated chamfering apparatus

IBM4 citations57

US6033289AMar 7, 2000

Detailing and cleaning apparatus for green ceramic dry dicing process

IBM6 citations51