Inventor

VAIL JIM

US3 patents

Patents

3 patents

US6247197B1Jun 19, 2001

Brush interflow distributor

LAM RES CORP48 citations92

US6230753B1May 15, 2001

Wafer cleaning apparatus

LAM RES CORP27 citations90

US6464796B2Oct 15, 2002

Methods for applying fluid through a brush interflow distributor

LAM RES CORP17 citations89