Inventor
HIKOSAKA YUKINOBU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “HIKOSAKA YUKINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
11 patentsUS5779925AJul 14, 1998
Plasma processing with less damage
FUJITSU LTD90 citations96
US6509593B2Jan 21, 2003
Semiconductor device and method of manufacturing the same
FUJITSU LTD50 citations95
US6706540B2Mar 16, 2004
Method of manufacturing a semiconductor device with a hydrogen barrier layer
FUJITSU LTD25 citations92
US6570203B2May 27, 2003
Semiconductor device and method of manufacturing the same
FUJITSU LTD42 citations92
US5471115ANov 28, 1995
Method and apparatus for measuring electron density of plasma
FUJITSU LTD42 citations92
US7390678B2Jun 24, 2008
Method for fabricating semiconductor device
FUJITSU LTD9 citations84
US7221015B2May 22, 2007
Semiconductor device and method of manufacturing the same
FUJITSU LTD16 citations82
US6913970B2Jul 5, 2005
Semiconductor device and method of manufacturing the same
FUJITSU LTD10 citations72
US6743647B2Jun 1, 2004
Semiconductor memory device manufacturing method
FUJITSU LTD3 citations62
US6710422B2Mar 23, 2004
Semiconductor device and method of manufacturing the same
FUJITSU LTD2 citations62
US7338815B2Mar 4, 2008
Semiconductor device manufacturing method
FUJITSU LTD3 citations59