Inventor

HSU SHEW-TSU

TW2 patents

Patents

2 patents

US6830877B2Dec 14, 2004

Method for forming via and contact holes with deep UV photoresist

TAIWAN SEMICONDUCTOR MFG11 citations70

US6583062B1Jun 24, 2003

Method of improving an aspect ratio while avoiding etch stop

TAIWAN SEMICONDUCTOR MFG12 citations70