Inventor
VOLODARSKY RIMMA
US7 patents
⚠️ This page may combine multiple inventors who share the name “VOLODARSKY RIMMA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUTOOL INC
4 patentsUS6352623B1Mar 5, 2002
Vertically configured chamber used for multiple processes
NUTOOL INC131 citations98
US6478936B1Nov 12, 2002
Anode assembly for plating and planarizing a conductive layer
NUTOOL INC46 citations96
US6777338B2Aug 17, 2004
Edge and bevel cleaning process and system
NUTOOL INC7 citations73
US6773576B2Aug 10, 2004
Anode assembly for plating and planarizing a conductive layer
NUTOOL INC5 citations73
ASM NUTOOL INC
3 patentsUS6969456B2Nov 29, 2005
Method of using vertically configured chamber used for multiple processes
ASM NUTOOL INC2 citations62
US6884334B2Apr 26, 2005
Vertically configured chamber used for multiple processes
ASM NUTOOL INC3 citations60
US7122473B2Oct 17, 2006
Edge and bevel cleaning process and system
ASM NUTOOL INC0 citations52