Inventor
OELMANN ANDREAS
DE4 patents
⚠️ This page may combine multiple inventors who share the name “OELMANN ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SIEMENS AG
3 patentsUS4140913AFeb 20, 1979
Charged-particle beam optical apparatus for the reduction imaging of a mask on a specimen
SIEMENS AG32 citations91
US4164658AAug 14, 1979
Charged-particle beam optical apparatus for imaging a mask on a specimen
SIEMENS AG16 citations72
US4136285AJan 23, 1979
Method for irradiating a specimen by corpuscular-beam radiation
SIEMENS AG12 citations70