Inventor
SUGITA KIPPEI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “SUGITA KIPPEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
23 patentsUS9903739B2Feb 27, 2018
Sensor chip for electrostatic capacitance measurement and measuring device having the same
TOKYO ELECTRON LTD9 citations83
US9841395B2Dec 12, 2017
System of inspecting focus ring and method of inspecting focus ring
TOKYO ELECTRON LTD8 citations83
US10354896B2Jul 16, 2019
Position detection system and processing apparatus
TOKYO ELECTRON LTD3 citations73
US10837991B2Nov 17, 2020
Electrostatic capacitance measuring device
TOKYO ELECTRON LTD2 citations72
US10074549B2Sep 11, 2018
Method for acquiring data indicating electrostatic capacitance
TOKYO ELECTRON LTD2 citations72
US10948317B2Mar 16, 2021
Measuring device and method for obtaining amount of deviation of measuring device
TOKYO ELECTRON LTD4 citations70
US10903100B2Jan 26, 2021
Method of obtaining amount of deviation of a measuring device, and method of calibrating transfer position data in a processing system
TOKYO ELECTRON LTD3 citations70
US9349584B2May 24, 2016
Method for depositing a film and film deposition apparatus
TOKYO ELECTRON LTD2 citations63
US11513194B2Nov 29, 2022
Ranging apparatus and method using the ranging apparatus
TOKYO ELECTRON LTD0 citations62
US10199251B2Feb 5, 2019
Position detecting system and processing apparatus
TOKYO ELECTRON LTD1 citations62
US11380568B2Jul 5, 2022
Transfer method and transfer system
TOKYO ELECTRON LTD0 citations60
US11735402B2Aug 22, 2023
Measurement method and measurement apparatus
TOKYO ELECTRON LTD0 citations56
US11604097B2Mar 14, 2023
Calibration method and calibration system
TOKYO ELECTRON LTD0 citations53
US11869752B2Jan 9, 2024
System and method for transferring a focus ring into processing apparatus
TOKYO ELECTRON LTD0 citations52
US11817335B2Nov 14, 2023
Method and system for inspecting processing apparatus
TOKYO ELECTRON LTD0 citations52
US10964575B2Mar 30, 2021
Transfer robot system, teaching method and wafer receptacle
TOKYO ELECTRON LTD0 citations52
US9708507B2Jul 18, 2017
Method for improving chemical resistance of polymerized film, polymerized film forming method, film forming apparatus, and electronic product manufacturing method
TOKYO ELECTRON LTD0 citations52
US12198954B2Jan 14, 2025
Execution device and execution method
TOKYO ELECTRON LTD0 citations51
US10018484B2Jul 10, 2018
Sensor chip for electrostatic capacitance measurement and measuring device having the same
TOKYO ELECTRON LTD1 citations51
US10861729B2Dec 8, 2020
Transfer method and transfer system
TOKYO ELECTRON LTD0 citations50
US11164729B2Nov 2, 2021
Measuring device and operation method of system for inspecting focus ring
TOKYO ELECTRON LTD0 citations49
US10837810B2Nov 17, 2020
Method for calibrating measuring device and case used in the calibration method
TOKYO ELECTRON LTD0 citations41
US10634479B2Apr 28, 2020
Measuring instrument for measuring electrostatic capacity and method of calibrating transfer position data in processing system by using measuring instrument
TOKYO ELECTRON LTD0 citations41