Inventor
KU TZU-KUN
TW21 patents
⚠️ This page may combine multiple inventors who share the name “KU TZU-KUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IND TECH RES INST
10 patentsUS5856237AJan 5, 1999
Insitu formation of TiSi2/TiN bi-layer structures using self-aligned nitridation treatment on underlying CVD-TiSi2 layer
IND TECH RES INST82 citations95
US6184135B1Feb 6, 2001
Insitu formation of TiSi2/TiN bi-layer structures using self-aligned nitridation treatment on underlying CVD-TiSi2 layer
IND TECH RES INST20 citations92
US6071552AJun 6, 2000
Insitu formation of TiSi2 /TiN bi-layer structures using self-aligned nitridation treatment on underlying CVD-TiSi2 layer
IND TECH RES INST25 citations92
US6184130B1Feb 6, 2001
Silicide glue layer for W-CVD plug application
IND TECH RES INST9 citations74
US6258716B1Jul 10, 2001
CVD titanium silicide for contact hole plugs
IND TECH RES INST8 citations73
US10416114B2Sep 17, 2019
Structures and manufacture method of electrochemical units
IND TECH RES INST3 citations68
US5930671AJul 27, 1999
CVD titanium silicide for contract hole plugs
IND TECH RES INST4 citations62
US9368475B2Jun 14, 2016
Semiconductor device and manufacturing method thereof
IND TECH RES INST2 citations61
US9093312B2Jul 28, 2015
Semiconductor device and manufacturing method thereof
IND TECH RES INST2 citations61
US9257338B2Feb 9, 2016
TSV substrate structure and the stacked assembly thereof
IND TECH RES INST0 citations40
SILICON INTEGRATED SYS CORP
3 patentsUS6713379B1Mar 30, 2004
Method for forming a damascene structure
SILICON INTEGRATED SYS CORP6 citations62
US6784075B2Aug 31, 2004
Method of forming shallow trench isolation with silicon oxynitride barrier film
SILICON INTEGRATED SYS CORP5 citations59
US6743690B2Jun 1, 2004
Method of forming a metal-oxide semiconductor transistor
SILICON INTEGRATED SYS CORP1 citations49
CENTRILLION TECH TAIWAN CO LTD
3 patentsUS10913070B2Feb 9, 2021
Microarray carrier assembly
CENTRILLION TECH TAIWAN CO LTD0 citations58
US10872924B2Dec 22, 2020
Microarray and method for forming the same
CENTRILLION TECH TAIWAN CO LTD0 citations48
US10732166B2Aug 4, 2020
Method for in-line measurement of quality of microarray
CENTRILLION TECH TAIWAN CO LTD0 citations38