Inventor
KOOS DANIEL A
US9 patents
⚠️ This page may combine multiple inventors who share the name “KOOS DANIEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
5 patentsUS6234877B1May 22, 2001
Method of chemical mechanical polishing
MICRON TECHNOLOGY INC195 citations98
US6120354ASep 19, 2000
Method of chemical mechanical polishing
MICRON TECHNOLOGY INC135 citations98
US5934980AAug 10, 1999
Method of chemical mechanical polishing
MICRON TECHNOLOGY INC261 citations98
US5413941AMay 9, 1995
Optical end point detection methods in semiconductor planarizing polishing processes
MICRON TECHNOLOGY INC353 citations98
US5741547AApr 21, 1998
Method for depositing a film of titanium nitride
MICRON TECHNOLOGY INC38 citations92
NOVELLUS SYSTEMS INC
3 patentsUS7338908B1Mar 4, 2008
Method for fabrication of semiconductor interconnect structure with reduced capacitance, leakage current, and improved breakdown voltage
NOVELLUS SYSTEMS INC66 citations96
US7972970B2Jul 5, 2011
Fabrication of semiconductor interconnect structure
NOVELLUS SYSTEMS INC17 citations92
US7531463B2May 12, 2009
Fabrication of semiconductor interconnect structure
NOVELLUS SYSTEMS INC31 citations91