Inventor
KIM SUNG C
US17 patents
⚠️ This page may combine multiple inventors who share the name “KIM SUNG C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
6 patentsUS6234877B1May 22, 2001
Method of chemical mechanical polishing
MICRON TECHNOLOGY INC195 citations98
US6120354ASep 19, 2000
Method of chemical mechanical polishing
MICRON TECHNOLOGY INC135 citations98
US5934980AAug 10, 1999
Method of chemical mechanical polishing
MICRON TECHNOLOGY INC261 citations98
US5409587AApr 25, 1995
Sputtering with collinator cleaning within the sputtering chamber
MICRON TECHNOLOGY INC63 citations96
US5270263ADec 14, 1993
Process for depositing aluminum nitride (AlN) using nitrogen plasma sputtering
MICRON TECHNOLOGY INC56 citations96
US5231306AJul 27, 1993
Titanium/aluminum/nitrogen material for semiconductor devices
MICRON TECHNOLOGY INC98 citations96
MOTOROLA INC
4 patentsUS5916011AJun 29, 1999
Process for polishing a semiconductor device substrate
MOTOROLA INC66 citations96
US5961373AOct 5, 1999
Process for forming a semiconductor device
MOTOROLA INC72 citations94
US5899745AMay 4, 1999
Method of chemical mechanical polishing (CMP) using an underpad with different compression regions and polishing pad therefor
MOTOROLA INC68 citations94
US6204169B1Mar 20, 2001
Processing for polishing dissimilar conductive layers in a semiconductor device
MOTOROLA INC42 citations91