Inventor

TAKASHIMA TOSHIHIDE

JP2 patents

⚠️ This page may combine multiple inventors who share the name “TAKASHIMA TOSHIHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US10381233B2Aug 13, 2019

Method and apparatus for substrate processing

TOKYO ELECTRON LTD5 citations68

HYAKUTAKE HIRONOBU

1 patent

US8685169B2Apr 1, 2014

Substrate processing apparatus, substrate processing method and storage medium

HYAKUTAKE HIRONOBU1 citations44