P

Inventor

KOBAYASHI KATSUHIRO

JP37 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI KATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU CHEMICAL CO

21 patents
US6916591B2Jul 12, 2005

Photoacid generators, chemically amplified resist compositions, and patterning process

SHINETSU CHEMICAL CO79 citations98
US7511169B2Mar 31, 2009

Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO45 citations96
US7981589B2Jul 19, 2011

Fluorinated monomer, fluorinated polymer, resist composition and patterning process

SHINETSU CHEMICAL CO22 citations93
US7919226B2Apr 5, 2011

Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO19 citations93
US7569324B2Aug 4, 2009

Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO18 citations93
US7090961B2Aug 15, 2006

Photo acid generator, chemical amplification resist material and pattern formation method

SHINETSU CHEMICAL CO18 citations93
US6689530B2Feb 10, 2004

Sulfonyldiazomethanes, photoacid generations, resist compositions, and patterning process

SHINETSU CHEMICAL CO21 citations92
US7618765B2Nov 17, 2009

Positive resist composition and patterning process

SHINETSU CHEMICAL CO14 citations84
US7556909B2Jul 7, 2009

Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO9 citations84
US7531290B2May 12, 2009

Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO17 citations84
US7833694B2Nov 16, 2010

Lactone-containing compound, polymer, resist composition, and patterning process

SHINETSU CHEMICAL CO9 citations83
US7276324B2Oct 2, 2007

Nitrogen-containing organic compound, resist composition and patterning process

SHINETSU CHEMICAL CO8 citations74
US6713612B2Mar 30, 2004

Sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO7 citations74
US7928262B2Apr 19, 2011

Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO2 citations63
US7541133B2Jun 2, 2009

Positive resist composition and patterning process

SHINETSU CHEMICAL CO4 citations63
US7235343B2Jun 26, 2007

Photoacid generators, chemically amplified resist compositions, and patterning process

SHINETSU CHEMICAL CO3 citations63
US7211367B2May 1, 2007

Photo acid generator, chemical amplification resist material

SHINETSU CHEMICAL CO4 citations63
US7109311B2Sep 19, 2006

Sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO6 citations62
US8030515B2Oct 4, 2011

Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO1 citations52
US7101651B2Sep 5, 2006

Sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO0 citations51
US7282316B2Oct 16, 2007

Sulfonyldiazomethane compounds, photoacid generator, resist materials and patterning using the same

SHINETSU CHEMICAL CO0 citations42

DAIICHI SANKYO CO LTD

5 patents

BRIDGESTONE CORP

2 patents

AGC INC

2 patents

ENDO SEISAKUSHO KK

1 patent

SEIKO S YARD CO LTD

1 patent

HATAKEYAMA JUN

1 patent

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

PANASONIC I PRO SENSING SOLUTIONS CO LTD

1 patent

TANIGUCHI RYOSUKE

1 patent

OKADA HIROYUKI

1 patent