Inventor
DAS PALASH P
US65 patents
⚠️ This page may combine multiple inventors who share the name “DAS PALASH P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
45 patentsUS6567450B2May 20, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC265 citations99
US6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US5982800ANov 9, 1999
Narrow band excimer laser
CYMER INC122 citations99
US5729562AMar 17, 1998
Pulse power generating circuit with energy recovery
CYMER INC241 citations99
US6625191B2Sep 23, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC236 citations98
US6381257B1Apr 30, 2002
Very narrow band injection seeded F2 lithography laser
CYMER INC106 citations98
US6370174B1Apr 9, 2002
Injection seeded F2 lithography laser
CYMER INC99 citations98
US6240117B1May 29, 2001
Fluorine control system with fluorine monitor
CYMER INC205 citations98
US6018537AJan 25, 2000
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC280 citations98
US6014398AJan 11, 2000
Narrow band excimer laser with gas additive
CYMER INC106 citations98
US5991324ANov 23, 1999
Reliable. modular, production quality narrow-band KRF excimer laser
CYMER INC196 citations98
US5978409ANov 2, 1999
Line narrowing apparatus with high transparency prism beam expander
CYMER INC104 citations98
US6721340B1Apr 13, 2004
Bandwidth control technique for a laser
CYMER INC114 citations97
US6671294B2Dec 30, 2003
Laser spectral engineering for lithographic process
CYMER INC114 citations97
US6529531B1Mar 4, 2003
Fast wavelength correction technique for a laser
CYMER INC86 citations97
US6493374B1Dec 10, 2002
Smart laser with fast deformable grating
CYMER INC90 citations97
US6192064B1Feb 20, 2001
Narrow band laser with fine wavelength control
CYMER INC258 citations97
US6078599AJun 20, 2000
Wavelength shift correction technique for a laser
CYMER INC115 citations97
US5978391ANov 2, 1999
Wavelength reference for excimer laser
CYMER INC123 citations97
US7009140B2Mar 7, 2006
Laser thin film poly-silicon annealing optical system
CYMER INC57 citations96
US6317448B1Nov 13, 2001
Bandwidth estimating technique for narrow band laser
CYMER INC65 citations96
US6151349ANov 21, 2000
Automatic fluorine control system
CYMER INC155 citations96
US6067306AMay 23, 2000
Laser-illuminated stepper or scanner with energy sensor feedback
CYMER INC84 citations96
US6028880AFeb 22, 2000
Automatic fluorine control system
CYMER INC227 citations96
US6005879ADec 21, 1999
Pulse energy control for excimer laser
CYMER INC231 citations96
US6693939B2Feb 17, 2004
Laser lithography light source with beam delivery
CYMER INC115 citations95
US6392743B1May 21, 2002
Control technique for microlithography lasers
CYMER INC64 citations95
US6618421B2Sep 9, 2003
High repetition rate gas discharge laser with precise pulse timing control
CYMER INC59 citations93
US6141081AOct 31, 2000
Stepper or scanner having two energy monitors for a laser
CYMER INC22 citations93
US5887014AMar 23, 1999
Process for selecting operating range for narrow band excimer laser
CYMER INC24 citations93
US7567607B2Jul 28, 2009
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC14 citations92
US7415056B2Aug 19, 2008
Confocal pulse stretcher
CYMER INC26 citations92
US6985508B2Jan 10, 2006
Very narrow band, two chamber, high reprate gas discharge laser system
CYMER INC29 citations92
US6704340B2Mar 9, 2004
Lithography laser system with in-place alignment tool
CYMER INC53 citations92
US6621846B1Sep 16, 2003
Electric discharge laser with active wavelength chirp correction
CYMER INC41 citations92
USRE38054EApr 1, 2003
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC42 citations92
US6320892B1Nov 20, 2001
Energy efficient lithography laser
CYMER INC21 citations92
US6061129AMay 9, 2000
Compact high resolution grating spectrometer
CYMER INC35 citations92
US6021150AFeb 1, 2000
Laser having baffled enclosure
CYMER INC35 citations92
US5848089ADec 8, 1998
Excimer laser with magnetic bearings supporting fan
CYMER INC51 citations92
US5748656AMay 5, 1998
Laser having improved beam quality and reduced operating cost
CYMER INC37 citations92
US6704339B2Mar 9, 2004
Lithography laser with beam delivery and beam pointing control
CYMER INC50 citations91
US5646954AJul 8, 1997
Maintenance strategy control system and monitoring method for gas discharge lasers
CYMER INC86 citations91
US6212217B1Apr 3, 2001
Smart laser with automated beam quality control
CYMER INC44 citations89
US5657334AAug 12, 1997
External high voltage control for a laser system
CYMER INC37 citations85
TCZ LLC
2 patentsCYMER LASER TECH
2 patentsTCZ GMBH
1 patentShowing the top 50 of 65 patents by PatentIndex Score.