Inventor
ERSHOV ALEXANDER I
US139 patents
Patents
50 patentsUS7196342B2Mar 27, 2007
Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
CYMER INC284 citations99
US6567450B2May 20, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC265 citations99
US6549551B2Apr 15, 2003
Injection seeded laser with precise timing control
CYMER INC186 citations99
US6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US5982800ANov 9, 1999
Narrow band excimer laser
CYMER INC122 citations99
US5970082AOct 19, 1999
Very narrow band laser
CYMER INC116 citations99
US5856991AJan 5, 1999
Very narrow band laser
CYMER INC198 citations99
US7491954B2Feb 17, 2009
Drive laser delivery systems for EUV light source
CYMER INC84 citations98
US7439530B2Oct 21, 2008
LPP EUV light source drive laser system
CYMER INC76 citations98
US6690704B2Feb 10, 2004
Control system for a two chamber gas discharge laser
CYMER INC128 citations98
US6625191B2Sep 23, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC236 citations98
US6538737B2Mar 25, 2003
High resolution etalon-grating spectrometer
CYMER INC109 citations98
US6535531B1Mar 18, 2003
Gas discharge laser with pulse multiplier
CYMER INC166 citations98
US6381257B1Apr 30, 2002
Very narrow band injection seeded F2 lithography laser
CYMER INC106 citations98
US6370174B1Apr 9, 2002
Injection seeded F2 lithography laser
CYMER INC99 citations98
US6094448AJul 25, 2000
Grating assembly with bi-directional bandwidth control
CYMER INC194 citations98
US6028879AFeb 22, 2000
Narrow band laser with etalon based output coupler
CYMER INC96 citations98
US6014398AJan 11, 2000
Narrow band excimer laser with gas additive
CYMER INC106 citations98
US5991324ANov 23, 1999
Reliable. modular, production quality narrow-band KRF excimer laser
CYMER INC196 citations98
US5978409ANov 2, 1999
Line narrowing apparatus with high transparency prism beam expander
CYMER INC104 citations98
US5901163AMay 4, 1999
Narrow band laser with etalon based output coupler
CYMER INC91 citations98
US5852627ADec 22, 1998
Laser with line narrowing output coupler
CYMER INC95 citations98
US7872245B2Jan 18, 2011
Systems and methods for target material delivery in a laser produced plasma EUV light source
CYMER INC90 citations97
US7671349B2Mar 2, 2010
Laser produced plasma EUV light source
CYMER INC54 citations97
US7217940B2May 15, 2007
Collector for EUV light source
CYMER INC60 citations97
US7164144B2Jan 16, 2007
EUV light source
CYMER INC113 citations97
US6192064B1Feb 20, 2001
Narrow band laser with fine wavelength control
CYMER INC258 citations97
US7655925B2Feb 2, 2010
Gas management system for a laser-produced-plasma EUV light source
CYMER INC43 citations96
US7317196B2Jan 8, 2008
LPP EUV light source
CYMER INC54 citations96
US7154928B2Dec 26, 2006
Laser output beam wavefront splitter for bandwidth spectrum control
CYMER INC62 citations96
US6865210B2Mar 8, 2005
Timing control for two-chamber gas discharge laser system
CYMER INC43 citations96
US6320663B1Nov 20, 2001
Method and device for spectral measurements of laser beam
CYMER INC59 citations96
US6240110B1May 29, 2001
Line narrowed F2 laser with etalon based output coupler
CYMER INC62 citations96
US5917849AJun 29, 1999
Line narrowing device with double duty grating
CYMER INC66 citations96
US6904073B2Jun 7, 2005
High power deep ultraviolet laser with long life optics
CYMER INC78 citations95
US6590922B2Jul 8, 2003
Injection seeded F2 laser with line selection and discrimination
CYMER INC63 citations95
US5835520ANov 10, 1998
Very narrow band KrF laser
CYMER INC140 citations95
US7822092B2Oct 26, 2010
Laser system
CYMER INC37 citations93
US7630424B2Dec 8, 2009
Laser system
CYMER INC24 citations93
US7449704B2Nov 11, 2008
EUV light source
CYMER INC26 citations93
US7411203B2Aug 12, 2008
EUV light source
CYMER INC27 citations93
US7388220B2Jun 17, 2008
EUV light source
CYMER INC23 citations93
US7288777B2Oct 30, 2007
Collector for EUV light source
CYMER INC18 citations93
US7247870B2Jul 24, 2007
Systems for protecting internal components of an EUV light source from plasma-generated debris
CYMER INC28 citations93
US7203216B2Apr 10, 2007
Timing control for two-chamber gas discharge laser system
CYMER INC18 citations93
US6738410B2May 18, 2004
Line narrowed laser with bidirection beam expansion
CYMER INC26 citations93
US6556612B2Apr 29, 2003
Line narrowed laser with spatial filter
CYMER INC26 citations93
US6243170B1Jun 5, 2001
Double pass etalon spectrometer
CYMER INC40 citations93
US6137821AOct 24, 2000
Durable etalon based output coupler
CYMER INC37 citations93
US5835210ANov 10, 1998
Multi-pass spectrometer
CYMER INC22 citations93
Showing the top 50 of 139 patents by PatentIndex Score.