Inventor
MORTON RICHARD G
US51 patents
⚠️ This page may combine multiple inventors who share the name “MORTON RICHARD G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
39 patentsUS6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US6067311AMay 23, 2000
Excimer laser with pulse multiplier
CYMER INC224 citations99
US6018537AJan 25, 2000
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC280 citations98
US5978409ANov 2, 1999
Line narrowing apparatus with high transparency prism beam expander
CYMER INC104 citations98
US6414979B2Jul 2, 2002
Gas discharge laser with blade-dielectric electrode
CYMER INC173 citations97
US6330261B1Dec 11, 2001
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
CYMER INC105 citations97
US6314119B1Nov 6, 2001
Excimer laser with pulse and beam multiplier
CYMER INC62 citations96
US6034978AMar 7, 2000
Gas discharge laser with gas temperature control
CYMER INC70 citations95
US6466602B1Oct 15, 2002
Gas discharge laser long life electrodes
CYMER INC69 citations94
US6584132B2Jun 24, 2003
Spinodal copper alloy electrodes
CYMER INC43 citations93
US6162495ADec 19, 2000
Protective overcoat for replicated diffraction gratings
CYMER INC22 citations93
US6058739AMay 9, 2000
Long life fused silica ultraviolet optical elements
CYMER INC26 citations93
US5999318ADec 7, 1999
Reflective overcoat for replicated diffraction gratings
CYMER INC80 citations93
US6560263B1May 6, 2003
Discharge laser having electrodes with sputter cavities and discharge peaks
CYMER INC35 citations92
USRE38054EApr 1, 2003
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC42 citations92
US6529321B2Mar 4, 2003
Protective overcoat for replicated diffraction gratings
CYMER INC19 citations92
US7068697B1Jun 27, 2006
Adjustable flow guide to accommodate electrode erosion in a gas discharge laser
CYMER INC30 citations91
US6654403B2Nov 25, 2003
Flow shaping electrode with erosion pad for gas discharge laser
CYMER INC16 citations84
US6511703B2Jan 28, 2003
Protective overcoat for replicated diffraction gratings
CYMER INC14 citations84
US6690706B2Feb 10, 2004
High rep-rate laser with improved electrodes
CYMER INC17 citations83
US6363094B1Mar 26, 2002
Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects
CYMER INC17 citations83
US7522650B2Apr 21, 2009
Gas discharge laser chamber improvements
CYMER INC8 citations82
US6963595B2Nov 8, 2005
Automatic gas control system for a gas discharge laser
CYMER INC20 citations81
US6711202B2Mar 23, 2004
Discharge laser with porous insulating layer covering anode discharge surface
CYMER INC8 citations74
US7535948B2May 19, 2009
Cathodes for fluorine gas discharge lasers
CYMER INC7 citations72
US7346093B2Mar 18, 2008
DUV light source optical element improvements
CYMER INC8 citations71
US6937635B2Aug 30, 2005
High rep-rate laser with improved electrodes
CYMER INC7 citations71
US6914927B2Jul 5, 2005
Laser discharge chamber passivation by plasma
CYMER INC5 citations71
US7095774B2Aug 22, 2006
Cathodes for fluorine gas discharge lasers
CYMER INC3 citations63
US7046713B2May 16, 2006
Discharge laser with porous layer covering anode discharge surface
CYMER INC2 citations63
US6014397AJan 11, 2000
Laser chamber incorporating ceramic insulators coated with dielectric material
CYMER INC3 citations63
US7706424B2Apr 27, 2010
Gas discharge laser system electrodes and power supply for delivering electrical energy to same
CYMER INC6 citations62
US7339973B2Mar 4, 2008
Electrodes for fluorine gas discharge lasers
CYMER INC2 citations61
US7301980B2Nov 27, 2007
Halogen gas discharge laser electrodes
CYMER INC5 citations61
US7132123B2Nov 7, 2006
High rep-rate laser with improved electrodes
CYMER INC3 citations60
US6644324B1Nov 11, 2003
Laser discharge chamber passivation by plasma
CYMER INC4 citations60
US7230965B2Jun 12, 2007
Anodes for fluorine gas discharge lasers
CYMER INC1 citations52
US7190708B2Mar 13, 2007
Annealed copper alloy electrodes for fluorine containing gas discharge lasers
CYMER INC1 citations52
US7003012B2Feb 21, 2006
Discharge laser with porous insulating layer covering anode discharge surface
CYMER INC0 citations52
JERSEY NUCLEAR AVCO ISOTOPES
4 patentsUS4325006AApr 13, 1982
High pulse repetition rate coaxial flashlamp
JERSEY NUCLEAR AVCO ISOTOPES25 citations82
US4176324ANov 27, 1979
High performance dye laser and flow channel therefor
JERSEY NUCLEAR AVCO ISOTOPES29 citations80
US4423511ADec 27, 1983
Unstable waveguide laser resonator
JERSEY NUCLEAR AVCO ISOTOPES14 citations74
US4178565ADec 11, 1979
Fluid laser flow channel liner
JERSEY NUCLEAR AVCO ISOTOPES8 citations74
MORTON RICHARD G
2 patentsMAXWELL LAB
2 patents(unassigned)
1 patentAVCO EVERETT RES LAB INC
1 patentUS ENERGY
1 patentShowing the top 50 of 51 patents by PatentIndex Score.