Inventor
CHEN JENG-SHIOU
TW22 patents
⚠️ This page may combine multiple inventors who share the name “CHEN JENG-SHIOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
16 patentsUS10714383B2Jul 14, 2020
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US9892960B2Feb 13, 2018
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US9401329B2Jul 26, 2016
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US11961761B2Apr 16, 2024
Mitigating pattern collapse
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10290538B2May 14, 2019
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10043706B2Aug 7, 2018
Mitigating pattern collapse
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9502287B2Nov 22, 2016
Method of preventing pattern collapse
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11682580B2Jun 20, 2023
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11088021B2Aug 10, 2021
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11043453B2Jun 22, 2021
Method of preventing pattern collapse
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10985054B2Apr 20, 2021
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10950495B2Mar 16, 2021
Mitigating pattern collapse
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US9412650B2Aug 9, 2016
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US10679895B2Jun 9, 2020
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10115630B2Oct 30, 2018
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10515895B2Dec 24, 2019
Method of preventing pattern collapse
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
TAIWAN SEMICONDUCTOR MFG
6 patentsUS9153479B2Oct 6, 2015
Method of preventing a pattern collapse
TAIWAN SEMICONDUCTOR MFG7 citations83
US8957006B2Feb 17, 2015
Cleaning solution comprising an ether acetate for preventing pattern collapse
TAIWAN SEMICONDUCTOR MFG3 citations62
US9373541B2Jun 21, 2016
Hard mask removal scheme
TAIWAN SEMICONDUCTOR MFG2 citations60
US9397047B2Jul 19, 2016
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG0 citations52
US9142450B2Sep 22, 2015
Interconnect structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG0 citations52
US9142452B2Sep 22, 2015
Hard mask removal scheme
TAIWAN SEMICONDUCTOR MFG0 citations50