Inventor

MARTINEZ NEGRETE GASQUE DIEGO

NL3 patents

Patents

3 patents

US12562334B2Feb 24, 2026

Multi-beam charged particle column

ASML NETHERLANDS BV0 citations55

US12555740B2Feb 17, 2026

Charged particle system, aperture array, charged particle tool and method of operating a charged particle system

ASML NETHERLANDS BV0 citations40

US12243714B2Mar 4, 2025

Lens designs

ASML NETHERLANDS BV0 citations33