Inventor

BEUGIN VINCENT CLAUDE

NL2 patents

Patents

2 patents

US12562334B2Feb 24, 2026

Multi-beam charged particle column

ASML NETHERLANDS BV0 citations55

US12555740B2Feb 17, 2026

Charged particle system, aperture array, charged particle tool and method of operating a charged particle system

ASML NETHERLANDS BV0 citations40