Inventor
EBATA KAZUAKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “EBATA KAZUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBATA KAZUAKI
4 patentsUS9767998B2Sep 19, 2017
Sputtering target
EBATA KAZUAKI3 citations70
US8785927B2Jul 22, 2014
Laminate structure including oxide semiconductor thin film layer, and thin film transistor
EBATA KAZUAKI5 citations70
US9153438B2Oct 6, 2015
Sintered oxide body, target comprising the same, and oxide semiconductor thin film
EBATA KAZUAKI1 citations50
US9039944B2May 26, 2015
Sputtering target
EBATA KAZUAKI0 citations50
IDEMITSU KOSAN CO
3 patentsUS11462399B2Oct 4, 2022
Sputtering target, oxide semiconductor thin film, and method for producing oxide semiconductor thin film
IDEMITSU KOSAN CO2 citations66
US11443943B2Sep 13, 2022
Sputtering target, oxide semiconductor thin film, and method for producing these
IDEMITSU KOSAN CO0 citations54
US10636914B2Apr 28, 2020
Crystalline oxide semiconductor thin film, method for producing crystalline oxide semiconductor thin film, and thin film transistor
IDEMITSU KOSAN CO0 citations51