Inventor

KUNZE-CONCEWITZ HORST

DE6 patents

⚠️ This page may combine multiple inventors who share the name “KUNZE-CONCEWITZ HORST”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

(unassigned)

3 patents

US5964952AOct 12, 1999

Method of cleaning surfaces with water and steam

117 citations95

US6251551B1Jun 26, 2001

Method and device for treating two-dimensional substrates, especially silicon slices (wafers), for producing microelectronic components

45 citations90

US6225235B1May 1, 2001

Method and device for cleaning and etching individual wafers using wet chemistry

35 citations90

CONVAC GMBH

3 patents

US5083364AJan 28, 1992

KUNZE-CONCEWITZ HORST

(unassigned)

Method of cleaning surfaces with water and steam

Method and device for treating two-dimensional substrates, especially silicon slices (wafers), for producing microelectronic components

Method and device for cleaning and etching individual wafers using wet chemistry

CONVAC GMBH

System for manufacturing semiconductor substrates

Apparatus for treating wafers in the manufacture of semiconductor elements

Apparatus for in-line lacquering of compact disks