Inventor · disambiguated record
David E. Kotecki
Also filed as: KOTECKI DAVID · KOTECKI DAVID E · KOTECKI DAVID EDWARD
60 granted patents·2 pending applications·2,376 citations·filing 1991–2004
99Inventor score
Files withIBM54ADVANCED TECH MATERIALS2INFINEON TECHNOLOGIES AG2INFINEON TECHNOLOGIES CORP2SIEMENS AG1
Top patents by PatentIndex Score
62 records- 0198US5789320APlating of noble metal electrodes for DRAM and FRAMIBM·Filed 1996·Granted Aug 4, 1998·326 cites·29 claims
- 0296US6178082B1High temperature, conductive thin film diffusion barrier for ceramic/metal systemsIBM·Filed 1998·Granted Jan 23, 2001·129 cites·15 claims
- 0391US6261967B1Easy to remove hard mask layer for semiconductor device fabricationINFINEON TECHNOLOGIES CORP·Filed 2000·Granted Jul 17, 2001·61 cites·46 claims
- 0490US6025226AMethod of forming a capacitor and a capacitor formed using the methodIBM·Filed 1998·Granted Feb 15, 2000·107 cites·28 claims
- 0589US5879985ACrown capacitor using a tapered etch of a damascene lower electrodeIBM·Filed 1997·Granted Mar 9, 1999·71 cites·19 claims
- 0689US5313094AThermal dissipation of integrated circuits using diamond pathsIBM·Filed 1992·Granted May 17, 1994·134 cites·3 claims
- 0787US6136664AFilling of high aspect ratio trench isolationIBM·Filed 1997·Granted Oct 24, 2000·88 cites·24 claims
- 0886US5633781AIsolated sidewall capacitor having a compound plate electrodeIBM·Filed 1995·Granted May 27, 1997·55 cites·49 claims
- 0986US5548470ACharacterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformityIBM·Filed 1994·Granted Aug 20, 1996·89 cites·21 claims
- 1085US6429474B1Storage-capacitor electrode and interconnectIBM·Filed 2000·Granted Aug 6, 2002·35 cites·23 claims
- 1185US6165864ATapered electrode for stacked capacitorsSIEMENS AG·Filed 1998·Granted Dec 26, 2000·62 cites·17 claims
- 1285US5796573AOverhanging separator for self-defining stacked capacitorIBM·Filed 1997·Granted Aug 18, 1998·42 cites·22 claims
- 1385US5741363AInteriorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor depositionADVANCED TECH MATERIALS·Filed 1996·Granted Apr 21, 1998·59 cites·18 claims
- 1484US5675471ACharacterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformityIBM·Filed 1995·Granted Oct 7, 1997·65 cites·21 claims
- 1584US5636320ASealed chamber with heating lamps provided within transparent tubesIBM·Filed 1995·Granted Jun 3, 1997·48 cites·20 claims
- 1683US6166423AIntegrated circuit having a via and a capacitorIBM·Filed 1999·Granted Dec 26, 2000·59 cites·7 claims
- 1782US5825609ACompound electrode stack capacitorIBM·Filed 1996·Granted Oct 20, 1998·58 cites·47 claims
- 1880US6727174B1Method for fabricating a dual-diameter electrical conductorIBM·Filed 2000·Granted Apr 27, 2004·29 cites·12 claims
- 1980US6207584B1High dielectric constant material deposition to achieve high capacitanceIBM·Filed 2000·Granted Mar 27, 2001·24 cites·31 claims
- 2078US6010748AMethod of delivering source reagent vapor mixtures for chemical vapor deposition using interiorly partitioned injectorADVANCED TECH MATERIALS·Filed 1998·Granted Jan 4, 2000·40 cites·7 claims
- 2178US5585998AIsolated sidewall capacitor with dual dielectricIBM·Filed 1995·Granted Dec 17, 1996·42 cites·24 claims
- 2276US6124199AMethod for simultaneously forming a storage-capacitor electrode and interconnectIBM·Filed 1999·Granted Sep 26, 2000·42 cites·9 claims
- 2376US5998250ACompound electrode stack capacitorIBM·Filed 1998·Granted Dec 7, 1999·43 cites·6 claims
- 2475US6323127B1Capacitor formed with Pt electrodes having a 3D cup-like shape with roughened inner and outer surfacesIBM·Filed 2000·Granted Nov 27, 2001·21 cites·20 claims
- 2575US5701647AMethod for making an isolated sidewall capacitor having a compound plate electrodeIBM·Filed 1997·Granted Dec 30, 1997·31 cites·12 claims
- 2674US6355567B1Retrograde openings in thin filmsIBM·Filed 1999·Granted Mar 12, 2002·42 cites·10 claims
- 2773US5266504ALow temperature emitter process for high performance bipolar devicesIBM·Filed 1992·Granted Nov 30, 1993·53 cites·14 claims
- 2872US6262450B1DRAM stack capacitor with vias and conductive connection extending from above conductive lines to the substrateIBM·Filed 1998·Granted Jul 17, 2001·27 cites·15 claims
- 2972US5914851AIsolated sidewall capacitorIBM·Filed 1995·Granted Jun 22, 1999·28 cites·24 claims
- 3071US6201272B1Method for simultaneously forming a storage-capacitor electrode and interconnectIBM·Filed 1999·Granted Mar 13, 2001·22 cites·18 claims
- 3169US5268069ASafe method for etching silicon dioxideIBM·Filed 1992·Granted Dec 7, 1993·44 cites·17 claims
- 3268US5973351ASemiconductor device with high dielectric constant insulator materialIBM·Filed 1997·Granted Oct 26, 1999·33 cites·11 claims
- 3368US5757612AStructure and fabrication method for non-planar memory elementsIBM·Filed 1996·Granted May 26, 1998·28 cites·17 claims
- 3468US5192708ASub-layer contact technique using in situ doped amorphous silicon and solid phase recrystallizationIBM·Filed 1991·Granted Mar 9, 1993·44 cites·12 claims
- 3567US6339007B1Capacitor stack structure and method of fabricating descriptionIBM·Filed 2000·Granted Jan 15, 2002·15 cites·15 claims
- 3666US5849638ADeep trench with enhanced sidewall surface areaIBM·Filed 1997·Granted Dec 15, 1998·24 cites·16 claims
- 3764US6150230ATrench separator for self-defining discontinuous filmIBM·Filed 1999·Granted Nov 21, 2000·19 cites·10 claims
- 3863US6420272B1Method for removal of hard mask used to define noble metal electrodeINFINEON TECHNOLOGIES AG·Filed 1999·Granted Jul 16, 2002·29 cites·8 claims
- 3962US6242321B1Structure and fabrication method for non-planar memory elementsIBM·Filed 1999·Granted Jun 5, 2001·21 cites·15 claims
- 4061US5932907AMethod, materials, and structures for noble metal electrode contacts to siliconIBM·Filed 1997·Granted Aug 3, 1999·19 cites·29 claims
- 4160US6255157B1Method for forming a ferroelectric capacitor under the bit lineIBM·Filed 1999·Granted Jul 3, 2001·18 cites·14 claims
- 4259US6544832B2Method of fabricating a stack capacitor DRAMIBM·Filed 2001·Granted Apr 8, 2003·7 cites·14 claims
- 4357US6222219B1Crown capacitor using a tapered etch of a damascene lower electrodeIBM·Filed 1998·Granted Apr 24, 2001·14 cites·20 claims
- 4457US6027966AIsolated sidewall capacitorIBM·Filed 1997·Granted Feb 22, 2000·14 cites·8 claims
- 4557US5712759ASidewall capacitor with L-shaped dielectricIBM·Filed 1995·Granted Jan 27, 1998·14 cites·13 claims
- 4656US6015985ADeep trench with enhanced sidewall surface areaIBM·Filed 1997·Granted Jan 18, 2000·19 cites·15 claims
- 4754US6395594B2Method for simultaneously forming a storage-capacitor electrode and interconnectIBM·Filed 2001·Granted May 28, 2002·4 cites·7 claims
- 4854US6379577B2Hydrogen peroxide and acid etchant for a wet etch processIBM·Filed 1999·Granted Apr 30, 2002·18 cites·12 claims
- 4954US5134963ALPCVD reactor for high efficiency, high uniformity depositionIBM·Filed 1991·Granted Aug 4, 1992·15 cites·9 claims
- 5048US6365328B1Semiconductor structure and manufacturing methodINFINEON TECHNOLOGIES CORP·Filed 2000·Granted Apr 2, 2002·3 cites·7 claims
Showing the top 50 of 62 patent records by PatentIndex Score.
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