Inventor
DIBLE ROBERT D
US6 patents
Patents
6 patentsUS6239403B1May 29, 2001
Power segmented electrode
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Power segmented electrode
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Methods and apparatus for generating plasma
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US5824606AOct 20, 1998
Methods and apparatuses for controlling phase difference in plasma processing systems
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US6411490B2Jun 25, 2002
Integrated power modules for plasma processing systems
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US6222718B1Apr 24, 2001
Integrated power modules for plasma processing systems
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