Inventor

CORBEIJ WILHELMUS MARIA

NL6 patents

⚠️ This page may combine multiple inventors who share the name “CORBEIJ WILHELMUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7791724B2Sep 7, 2010

Characterization of transmission losses in an optical system

ASML NETHERLANDS BV59 citations96

US7480050B2Jan 20, 2009

Lithographic system, sensor, and method of measuring properties of a substrate

ASML NETHERLANDS BV13 citations83

CORBEIJ WILHELMUS MARIA

2 patents

US8482718B2Jul 9, 2013

Lithographic apparatus and device manufacturing method

CORBEIJ WILHELMUS MARIA5 citations69

US8497976B2Jul 30, 2013

Substrate measurement method and apparatus

CORBEIJ WILHELMUS MARIA0 citations48

ASML NETHERLANDS

1 patent

US7403293B2Jul 22, 2008

Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method

ASML NETHERLANDS15 citations78

ASM LITHOGRAPHY BV

1 patent

US6348303B1Feb 19, 2002

Lithographic projection apparatus

ASM LITHOGRAPHY BV9 citations66