Inventor
KIRYU HIDEKI
JP3 patents
Patents
3 patentsUS6467491B1Oct 22, 2002
Processing apparatus and processing method
TOKYO ELECTRON LTD97 citations96
US6617207B1Sep 9, 2003
Method and system for forming a stacked gate insulating film
TOKYO ELECTRON LTD21 citations90
US6866890B2Mar 15, 2005
Method of forming a dielectric film
TOKYO ELECTRON LTD18 citations83