Inventor

KIMURA SHIZUAKI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KIMURA SHIZUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

2 patents

US6716300B2Apr 6, 2004

Emission spectroscopic processing apparatus

HITACHI LTD8 citations72

US7455790B2Nov 25, 2008

Emission spectroscopic processing apparatus and plasma processing method using it

HITACHI LTD2 citations61

HITACHI HIGH TECH CORP

1 patent

US6890771B2May 10, 2005

Plasma processing method using spectroscopic processing unit

HITACHI HIGH TECH CORP6 citations72