Inventor
KING MINGCHU
TW8 patents
Patents
8 patentsUS6207546B1Mar 27, 2001
Prevent passivation from keyhole damage and resist extrusion by a crosslinking mechanism
TAIWAN SEMICONDUCTOR MFG25 citations92
US5952132ASep 14, 1999
Method for forming a stepper focus pattern through determination of overlay error
TAIWAN SEMICONDUCTOR MFG39 citations92
US7117057B1Oct 3, 2006
Yield patrolling system
TAIWAN SEMICONDUCTOR MFG42 citations88
US6130013AOct 10, 2000
Birefringent interlayer for attenuating standing wave photoexposure of a photoresist layer formed over a reflective layer
TAIWAN SEMICONDUCTOR MFG8 citations72
US7368775B2May 6, 2008
Single transistor DRAM cell with reduced current leakage and method of manufacture
TAIWAN SEMICONDUCTOR MFG3 citations62
US7087483B2Aug 8, 2006
Single transistor RAM cell and method of manufacture
TAIWAN SEMICONDUCTOR MFG4 citations62
US5945255AAug 31, 1999
Birefringent interlayer for attenuating standing wave photoexposure of a photoresist layer formed over a reflective layer
TAIWAN SEMICONDUCTOR MFG4 citations61
US5998071ADec 7, 1999
Method to monitor lens heating effects
TAIWAN SEMICONDUCTOR MFG6 citations59