Inventor
IMOTO KOUHEI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “IMOTO KOUHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
3 patentsUS7602564B2Oct 13, 2009
Optical element holding apparatus
CANON KK11 citations81
US7878665B2Feb 1, 2011
Holding apparatus for holding optical element above a base, exposure apparatus including the holding apparatus, and device manufacturing method using the exposure apparatus
CANON KK13 citations79
US7525106B2Apr 28, 2009
Exposure apparatus, pressure control method for the same, and device manufacturing method
CANON KK4 citations60