Inventor

BUSHEY MARY CONROY

US3 patents

Patents

3 patents

US6335294B1Jan 1, 2002

Wet cleans for cobalt disilicide processing

IBM7 citations70

US7696586B2Apr 13, 2010

Cobal disilicide structure

IBM2 citations59

US7411258B2Aug 12, 2008

Cobalt disilicide structure

IBM0 citations48