Inventor

PETRIC PAUL F

US21 patents

⚠️ This page may combine multiple inventors who share the name “PETRIC PAUL F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PETRIC PAUL F

IBM

Electron beam projection lithography system (EBPS)

Curvilinear variable axis lens correction with shifted dipoles

Method for centering a lens in a charged-particle system

Variable curvilinear axis deflection means for particle optical lenses

Electron beam nano-metrology system

Variable axis stigmator

Variable axis stigmator

Electron beam lens and deflection system for plural-level telecentric deflection

Inductively coupled dual-stage magnetic deflection yoke

Inductively coupled dual-stage magnetic deflection yoke

Curvilinear axis set-up for charged particle lithography

VARIAN ASSOCIATES

Charged particle beam lithography machine incorporating localized vacuum envelope

Gap control system for localized vacuum processing

Envelope apparatus for localized vacuum processing

Apparatus for positioning a workpiece in a localized vacuum processing system

Charged particle beam exposure system utilizing variable line scan

Localized vacuum processing apparatus

KLA TENCOR CORP

Quasi-annular reflective electron patterning device

Apparatus and methods for electron beam lithography using array cathode

Compact high-voltage electron gun

PETRIC PAUL F

Reflection electron beam projection lithography using an ExB separator