Inventor
ROBINSON CHRISTOPHER F
US16 patents
⚠️ This page may combine multiple inventors who share the name “ROBINSON CHRISTOPHER F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
12 patentsUS6451510B1Sep 17, 2002
Developer/rinse formulation to prevent image collapse in resist
IBM68 citations94
US7057715B2Jun 6, 2006
Lithography tool test patterns and method
IBM11 citations83
US6326634B1Dec 4, 2001
E-beam shape aperature incorporating lithographically defined heater element
IBM7 citations73
US6476400B1Nov 5, 2002
Method of adjusting a lithography system to enhance image quality
IBM7 citations72
US6262425B1Jul 17, 2001
Curvilinear axis set-up for charged particle lithography
IBM7 citations72
US10274836B2Apr 30, 2019
Determination of lithography effective dose uniformity
IBM3 citations71
US10642161B1May 5, 2020
Baseline overlay control with residual noise reduction
IBM5 citations69
US10281826B2May 7, 2019
Determination of lithography effective dose uniformity
IBM1 citations61
US7391023B2Jun 24, 2008
Lithography tool image quality evaluating and correcting
IBM4 citations61
US6931337B2Aug 16, 2005
Lithography tool image quality evaluating and correcting
IBM0 citations51
US6639219B2Oct 28, 2003
Electron scatter in a thin membrane to eliminate detector saturation
IBM0 citations51
US11402361B2Aug 2, 2022
Personnel-tolerant carbon dioxide beamline variation reduction
IBM0 citations41